publication
Conference Paper
2012
Influence of the nonlinearity introduced by the van der Waals forceon the behaviour of NEM resonators
Rottenberg, M. Zanaty, R. Jansen, V. Rochus, M. Abbas, A. Witvrouw, H. A. C. Tilmans, X. . 2012
Conference Location
Ilmenau, Germany
Conference Name
The 23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
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