Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats

Journal Article
Yoon, C.-W. Park, T.-G. Kim, M.-W. Kim, A. Aldalbahi, M. El-Newehy and S.S. . 2020
Magazine \ Newspaper: 
Journal of Visualization
Issue Number: 
2
Volume Number: 
23
Pages: 
269-285