PHYS 641 Vacuum and Thin film Technology

Vacuum principles and vacuum system design basics, Overview of thin film technology, crystal structures of thin films, Defects in Thin films, Nano crystalline, polycrystalline, and epitaxial thin films, thin film nucleation and growth models, (2D, 3D, and 2D- Epitaxial growth of thin films, super lattice structures and quantum wells, diffusions: inter-diffusion, grain boundary diffusions, reaction and phase transformation, Thin film growth techniques (CBD, Spray, Reactive evaporation,  PVD, Sputtering, MBE, Laser MBE PLD, CVD, PECVD, MOCVD, Sol-Gel, PAD.), Thin film processing, Thin film characterization techniques.