NAN 524 Micro and Nanofabrication Techniques (First semester 2025)

Physical and chemical vapor deposition (PVD & CVD) techniques for single and multilayered nanostructures. Thermal oxidation, doping, ion implantation, and diffusion processes will be covered. Lithography and direct writing techniques. Pattern generation and transfer methods. Dicing, wire bonding, passivation, and packaging techniques. Experimental activities on photolithography process flow in a cleanroom environment.