Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats

Yoon, C.-W. Park, T.-G. Kim, M.-W. Kim, A. Aldalbahi, M. El-Newehy and S.S. . 2020

رقم المجلد

رقم الانشاء

مجلة/صحيفة

Journal of Visualization

الصفحات

269-285

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Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats

Yoon, C.-W. Park, T.-G. Kim, M.-W. Kim, A. Aldalbahi, M. El-Newehy and S.S. . 2020