Introduction to semiconductor devices; crystal growth and wafer preparation; chemical and physical vapor deposition; oxidation; diffusion; ion implantation; lithography; etching; metallization;…
Fundamental properties; Process modeling ( ion implantation, diffusion & oxidation); Physical parameters ( mobility, generation and recombination rates, conductivity, ...); Analytical…
The course is taught under the title " MEMS, Microsensors and Microfabrication". The course is concerned with MEMS sensors and actuators and their coupled-physics concepts of operation. The course…