Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats

Yoon, C.-W. Park, T.-G. Kim, M.-W. Kim, A. Aldalbahi, M. El-Newehy and S.S. . 2020

Volume Number

Issue Number

Magazine \ Newspaper

Journal of Visualization

Pages

269-285

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Mohamed Hassan El-Newehy

Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats

Yoon, C.-W. Park, T.-G. Kim, M.-W. Kim, A. Aldalbahi, M. El-Newehy and S.S. . 2020