EE619 Advanced Topics in Electronics

The course is taught under the title " MEMS, Microsensors and Microfabrication". The course is concerned with MEMS sensors and actuators and their coupled-physics concepts of operation. The course introduces, from a practical approach, Microlithography and Microfabrication techniques utilized for realizing MEMS, microsensors and micromachined transducers. The course also introduces  Materials used in MEMS, microsensors and micromachined transducers. And through some cases studies, the course pays a special focus on MEMS and microsensors for thermal sensing, inertial MEMS and optical MEMS devices.